半导体蚀刻剂
产品号
|
蚀刻剂
|
蚀刻速率
|
RSE-100
|
缓慢蚀刻硅
|
20 Å /秒
|
RSE-200
|
蚀刻台面型晶体管
|
100 Å /秒
|
产品号
|
蚀刻剂组成比
|
RSE-101
|
10:1
|
RSE-41
|
4:1
|
RSE-31
|
3:1
|
RSE-12
|
1:2
|
产品号
|
蚀刻剂组成比
|
RSE-533
|
5:3:3
|
RSE-511
|
5:1:1
|
RSE-111
|
1:1:1
|
RSE-322
|
3:2:2
|
RSE-1155
|
11:5:5
|
RSE-563
|
5:6:3,250 Å /秒,20℃蚀刻锗
|